A novel scheme for simple and precise measurement of the complex refractive index and thickness of thin films

摘要

We demonstrate applications of a novel scheme which is used for measuringrefractive index and thickness of thin film by analyzing the relative phasedifference and reflected ratio at reflection point of a monolithic foldedFabry-Perot cavity (MFC). The complex refractive index and the thickness arecalculated according to the Fresnel formula. Results show that the proposedmethod has a big improvement in accuracy with simple and clear operatingprocess compared with the conventional Ellipsometry.